THE cathodic sputtering process has been almost completely replaced in recent years by the vacuum evaporation technique for the production of thin solid films. However, renewed interest in the ...

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Thin films play a crucial role in the fabrication of several components and devices, such as protective coatings, integrated circuits, solar cells, and optical ...

BERKELEY, CA – In the electronics industry, thin metal films are deposited on silicon wafers with a sputter gun, which uses energetic ions – atoms with a positive charge – to knock the metal atoms off ...

Since the early 1960s, physical vapor deposition (PVD) equipment has been used to fabricate IC circuitry and other sensitive devices. In the 1980s, advances in personal computers enabled PVD ...