SAN JOSE, Calif.–Responding to an outcry over the soaring cost of chemical mechanical polishing (CMP) technology, several chip-equipment vendors are readying new tools that are said to bring down the ...
Metrology supplier Nanometrics Inc. and process tool vendor Ebara Corp. said today that Nanometrics will begin supplying integrated metrology to Ebara The Milpitas Calif.-based Nanometrics recently ...
Producing high-purity wafers via the CMP process is a critical application and the halting of harmful slurry-DIW ...
Suppliers of chemical mechanical planarization (CMP) slurries may be fierce competitors of Cabot Microelectronics, the company considered to be the sector's number one player, but they agree with the ...
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